JPS62204326U - - Google Patents
Info
- Publication number
- JPS62204326U JPS62204326U JP9266986U JP9266986U JPS62204326U JP S62204326 U JPS62204326 U JP S62204326U JP 9266986 U JP9266986 U JP 9266986U JP 9266986 U JP9266986 U JP 9266986U JP S62204326 U JPS62204326 U JP S62204326U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- photoresist pattern
- spin
- developer
- uniformly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims 2
- 239000007924 injection Substances 0.000 claims 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9266986U JPS62204326U (en]) | 1986-06-17 | 1986-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9266986U JPS62204326U (en]) | 1986-06-17 | 1986-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62204326U true JPS62204326U (en]) | 1987-12-26 |
Family
ID=30954579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9266986U Pending JPS62204326U (en]) | 1986-06-17 | 1986-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62204326U (en]) |
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1986
- 1986-06-17 JP JP9266986U patent/JPS62204326U/ja active Pending